Problem AG4108 SNF 2005-04-28 15:04:22: brown film
uli at snf.stanford.edu
uli at snf.stanford.edu
Thu Apr 28 15:04:23 PDT 2005
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Problem AG4108 SNF 2005-04-14 22:43:15: the gas pressure is not showing on the side panel
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Problem AG4108 SNF 2005-04-28 15:04:22: brown film
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chamber is too dirty for clean processing!!!
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Problem AG4108 SNF 2005-04-14 22:43:15: the gas pressure is not showing on the side panel
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Problem AG4108 SNF 2005-04-28 15:04:22: brown film
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