From riteshj at snf.stanford.edu Tue Aug 2 17:30:37 2005 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Tue, 2 Aug 2005 17:30:37 -0700 Subject: Problem AG4108 SNF 2005-08-02 17:30:36: film on the ceiling of the RTA chamber Message-ID: there seems to be a film on the ceiling of the RTA chamber just above where the wafer would be. From robinhmb at yahoo.com Tue Aug 2 18:18:26 2005 From: robinhmb at yahoo.com (Robin King) Date: Tue, 2 Aug 2005 18:18:26 -0700 (PDT) Subject: Problem AG4108 SNF 2005-08-02 17:30:36: film on the ceiling of the RTA chamber In-Reply-To: <200508030030.j730UiHE005905@smtp2.Stanford.EDU> Message-ID: <20050803011826.22395.qmail@web54708.mail.yahoo.com> I also saw that before running our wafers yesterday and logged it in the book. Have looked through the logbook with riteshj and we can't tell where it's coming from. --- riteshj at snf.stanford.edu wrote: > there seems to be a film on the ceiling of the RTA chamber just > above where the wafer would be. > > ____________________________________________________ Start your day with Yahoo! - make it your home page http://www.yahoo.com/r/hs From eenriquez at snf.stanford.edu Wed Aug 3 11:26:58 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Aug 2005 11:26:58 -0700 Subject: Problem AG4108 SNF 2005-08-02 17:30:36: film on the ceiling of the RTA chamber Message-ID: Cleaned chamber From eenriquez at snf.stanford.edu Wed Aug 3 11:27:20 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Aug 2005 11:27:20 -0700 Subject: Comment AG4108 SNF 2005-07-13 15:04:57: oxide tray is installed Message-ID: installed silicide tray From eenriquez at snf.stanford.edu Wed Aug 3 11:27:46 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Aug 2005 11:27:46 -0700 Subject: Comment AG4108 SNF 2005-08-03 11:27:44: Installed silicide tray Message-ID: From pethe at snf.stanford.edu Wed Aug 3 18:26:07 2005 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Wed, 3 Aug 2005 18:26:07 -0700 Subject: Problem AG4108 SNF 2005-08-03 18:26:06: NH3/NF3 out of range Message-ID: The NH3 flow reduced through the step from 5 SLPM to zero. From pethe at snf.stanford.edu Wed Aug 3 19:31:58 2005 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Wed, 3 Aug 2005 19:31:58 -0700 Subject: Comment AG4108 SNF 2005-08-03 19:31:57: brown film in chamber Message-ID: From eenriquez at snf.stanford.edu Thu Aug 4 15:20:09 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 4 Aug 2005 15:20:09 -0700 Subject: Comment AG4108 SNF 2005-08-03 19:31:57: brown film in chamber Message-ID: Cleaned chamber with DI water and IPA From eenriquez at snf.stanford.edu Thu Aug 4 15:24:43 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 4 Aug 2005 15:24:43 -0700 Subject: Problem AG4108 SNF 2005-08-03 18:26:06: NH3/NF3 out of range Message-ID: User will reduce flow of NH3 to 3-4 slm. From eenriquez at snf.stanford.edu Fri Aug 5 14:52:30 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 5 Aug 2005 14:52:30 -0700 Subject: Comment AG4108 SNF 2005-08-03 11:27:44: Installed silicide tray Message-ID: installed oxidation tray From eenriquez at snf.stanford.edu Fri Aug 5 14:52:55 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 5 Aug 2005 14:52:55 -0700 Subject: Comment AG4108 SNF 2005-08-05 14:52:54: installed oxidation tray Message-ID: From pethe at snf.stanford.edu Mon Aug 8 19:17:44 2005 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Mon, 8 Aug 2005 19:17:44 -0700 Subject: Comment AG4108 SNF 2005-08-08 19:17:44: Brown film in chamber Message-ID: From eenriquez at snf.stanford.edu Thu Aug 11 12:19:07 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 11 Aug 2005 12:19:07 -0700 Subject: Comment AG4108 SNF 2005-08-08 19:17:44: Brown film in chamber Message-ID: Wet cleaned chamber. From eenriquez at snf.stanford.edu Thu Aug 11 12:19:41 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 11 Aug 2005 12:19:41 -0700 Subject: Comment AG4108 SNF 2005-08-05 14:52:54: installed oxidation tray Message-ID: From eenriquez at snf.stanford.edu Thu Aug 11 12:19:59 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 11 Aug 2005 12:19:59 -0700 Subject: Comment AG4108 SNF 2005-08-11 12:19:58: Installed oxidation tray Message-ID: From riteshj at snf.stanford.edu Fri Aug 12 01:06:27 2005 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Fri, 12 Aug 2005 01:06:27 -0700 Subject: Problem AG4108 SNF 2005-08-12 01:06:26: brown disk on the roof of the chamber Message-ID: after i completed my process (dopant activation in phosphorus doped poly) (1000C, 30s) a brownish disk was formed. (??) From eenriquez at snf.stanford.edu Fri Aug 12 13:44:09 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 12 Aug 2005 13:44:09 -0700 Subject: Problem AG4108 SNF 2005-08-12 01:06:26: brown disk on the roof of the chamber Message-ID: Wet cleaned the chamber. From eenriquez at snf.stanford.edu Fri Aug 12 13:44:42 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 12 Aug 2005 13:44:42 -0700 Subject: Comment AG4108 SNF 2005-08-11 12:19:58: Installed oxidation tray Message-ID: Installed silicide tray. From eenriquez at snf.stanford.edu Fri Aug 12 13:44:55 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 12 Aug 2005 13:44:55 -0700 Subject: Comment AG4108 SNF 2005-08-12 13:44:55: Installed silicide tray. Message-ID: From chion at snf.stanford.edu Mon Aug 15 15:51:46 2005 From: chion at snf.stanford.edu (chion at snf.stanford.edu) Date: Mon, 15 Aug 2005 15:51:46 -0700 Subject: Problem AG4108 SNF 2005-08-15 15:51:45: NH3 running out.... Message-ID: Flow not reaching.....process aborted From cbaxter at snf.stanford.edu Mon Aug 15 21:34:54 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 15 Aug 2005 21:34:54 -0700 Subject: Problem AG4108 SNF 2005-08-15 15:51:45: NH3 running out.... Message-ID: checked cylinder NH3 is ok. I run a dummy wafer NH3 is flowing fine. From rcrane at snf.stanford.edu Wed Aug 17 11:41:17 2005 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Wed, 17 Aug 2005 11:41:17 -0700 Subject: Shutdown AG4108 SNF 2005-08-17 11:41:16: Down for gas connection work Message-ID: Down for to allow ag4100 gas lines to be connected From eenriquez at snf.stanford.edu Tue Aug 30 13:43:56 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 30 Aug 2005 13:43:56 -0700 Subject: Shutdown AG4108 SNF 2005-08-17 11:41:16: Down for gas connection work Message-ID: All gases except for N2O has been turned back on. Need to qualify process. We are waiting for an N2O cylinder. From eenriquez at snf.stanford.edu Tue Aug 30 13:47:25 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 30 Aug 2005 13:47:25 -0700 Subject: Problem AG4108 SNF 2005-08-30 13:47:24: No N2O Message-ID: N2O is not available. Waiting for a new cylinder. From eenriquez at snf.stanford.edu Wed Aug 31 16:39:18 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 31 Aug 2005 16:39:18 -0700 Subject: Comment AG4108 SNF 2005-08-12 13:44:55: Installed silicide tray. Message-ID: Installed oxidation tray From eenriquez at snf.stanford.edu Wed Aug 31 16:40:42 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 31 Aug 2005 16:40:42 -0700 Subject: Comment AG4108 SNF 2005-08-31 16:40:41: Installed oxidation tray and cassettes Message-ID: