Problem AG4108 SNF 2005-08-02 17:30:36: film on the ceiling of the RTA chamber

Robin King robinhmb at yahoo.com
Tue Aug 2 18:18:26 PDT 2005


I also saw that before running our wafers yesterday and logged it in
the book.  Have looked through the logbook with riteshj and we can't
tell where it's coming from.

--- riteshj at snf.stanford.edu wrote:

> there seems to be a film on the ceiling of the RTA chamber just
> above where the wafer would be. 
> 
> 



		
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