Problem AG4108 SNF 2005-08-02 17:30:36: film on the ceiling of the RTA chamber
robinhmb at yahoo.com
Tue Aug 2 18:18:26 PDT 2005
I also saw that before running our wafers yesterday and logged it in
the book. Have looked through the logbook with riteshj and we can't
tell where it's coming from.
--- riteshj at snf.stanford.edu wrote:
> there seems to be a film on the ceiling of the RTA chamber just
> above where the wafer would be.
Start your day with Yahoo! - make it your home page
More information about the AG4108-pcs