Problem AG4108 SNF 2005-08-03 18:26:06: NH3/NF3 out of range
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Aug 4 15:24:43 PDT 2005
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Problem AG4108 SNF 2005-08-03 18:26:06: NH3/NF3 out of range
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Comment AG4108 SNF 2005-08-03 19:31:57: brown film in chamber
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User will reduce flow of NH3 to 3-4 slm.
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Problem AG4108 SNF 2005-08-03 18:26:06: NH3/NF3 out of range
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Comment AG4108 SNF 2005-08-03 19:31:57: brown film in chamber
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