Problem AG4108 SNF 2005-08-12 01:06:26: brown disk on the roof of the chamber

riteshj at snf.stanford.edu riteshj at snf.stanford.edu
Fri Aug 12 01:06:27 PDT 2005


after i completed my process (dopant activation in phosphorus doped poly) (1000C, 30s) a brownish disk was formed. (??)




More information about the AG4108-pcs mailing list