Comment AG4108 SNF 2005-08-11 12:19:58: Installed oxidation tray
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Aug 12 13:44:42 PDT 2005
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Comment AG4108 SNF 2005-08-11 12:19:58: Installed oxidation tray
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Problem AG4108 SNF 2005-08-12 01:06:26: brown disk on the roof of the chamber
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Installed silicide tray.
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Comment AG4108 SNF 2005-08-11 12:19:58: Installed oxidation tray
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Problem AG4108 SNF 2005-08-12 01:06:26: brown disk on the roof of the chamber
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