From cbaxter at snf.stanford.edu Thu Feb 3 18:48:32 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 3 Feb 2005 18:48:32 -0800 Subject: Shutdown AG4108 SNF 2005-01-27 17:17:25: does not heat up to set temp Message-ID: corrected recipe temperature setting From cbaxter at snf.stanford.edu Thu Feb 3 18:48:39 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 3 Feb 2005 18:48:39 -0800 Subject: Problem AG4108 SNF 2005-01-26 17:23:44: temperature can't be ramped up over 800C Message-ID: From alissa at snf.stanford.edu Fri Feb 4 14:52:14 2005 From: alissa at snf.stanford.edu (alissa at snf.stanford.edu) Date: Fri, 4 Feb 2005 14:52:14 -0800 Subject: Comment AG4108 SNF 2005-02-04 14:52:13: faint haze in chamber Message-ID: I observed a very faint haze in the chamber after my run (6 wafers). From uli at snf.stanford.edu Fri Feb 4 17:46:32 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 4 Feb 2005 17:46:32 -0800 Subject: Comment AG4108 SNF 2005-02-04 17:46:31: RTO test result Message-ID: I ran my standard RTO 1150C 30sec recipe. I used to get 140 A, today, I measured 115A oxide. From uli at snf.stanford.edu Fri Feb 4 17:46:58 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 4 Feb 2005 17:46:58 -0800 Subject: Comment AG4108 SNF 2005-02-04 14:52:13: faint haze in chamber Message-ID: Elmer cleaned the chamber From uli at snf.stanford.edu Fri Feb 4 18:02:48 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 4 Feb 2005 18:02:48 -0800 Subject: Problem AG4108 SNF 2005-02-04 18:02:48: Temp. problem? Message-ID: I ran my standard RTO 1150C 30sec recipe. I used to get 140 A, today, I measured 115A oxide. There might be a temperature problem From uli at snf.stanford.edu Fri Feb 4 18:03:37 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 4 Feb 2005 18:03:37 -0800 Subject: Comment AG4108 SNF 2005-02-04 17:46:31: RTO test result Message-ID: changed comment to problem From barlian at snf.stanford.edu Sun Feb 6 00:59:37 2005 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Sun, 6 Feb 2005 00:59:37 -0800 Subject: Comment AG4108 SNF 2005-02-06 00:59:36: graph Message-ID: Uli, I looked at the RTO graph in the logbook, 1150C for 30 secs should grow about 115A of oxide. It's exactly on the data point :-) From eenriquez at snf.stanford.edu Tue Feb 8 10:23:36 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Feb 2005 10:23:36 -0800 Subject: Problem AG4108 SNF 2005-02-04 18:02:48: Temp. problem? Message-ID: Cleaned chamber and Uli verified process. From eenriquez at snf.stanford.edu Tue Feb 8 10:38:57 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Feb 2005 10:38:57 -0800 Subject: Comment AG4108 SNF 2005-01-06 10:10:32: Installed oxidation tray Message-ID: Installed the silicide tray From eenriquez at snf.stanford.edu Tue Feb 8 10:39:11 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Feb 2005 10:39:11 -0800 Subject: Comment AG4108 SNF 2005-02-08 10:39:10: Installed the silicide tray Message-ID: From eenriquez at snf.stanford.edu Fri Feb 11 09:45:46 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Feb 2005 09:45:46 -0800 Subject: Comment AG4108 SNF 2005-02-08 10:39:10: Installed the silicide tray Message-ID: installed oxidation tray From eenriquez at snf.stanford.edu Fri Feb 11 09:46:16 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Feb 2005 09:46:16 -0800 Subject: Comment AG4108 SNF 2005-02-11 09:46:16: Installed oxidation tray Message-ID: From eenriquez at snf.stanford.edu Fri Feb 18 14:10:31 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 18 Feb 2005 14:10:31 -0800 Subject: Comment AG4108 SNF 2005-02-11 09:46:16: Installed oxidation tray Message-ID: installed silicide tray From eenriquez at snf.stanford.edu Fri Feb 18 14:10:56 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 18 Feb 2005 14:10:56 -0800 Subject: Comment AG4108 SNF 2005-02-18 14:10:53: Installed silicide tray Message-ID: From aokyay at snf.stanford.edu Sun Feb 20 16:10:46 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Sun, 20 Feb 2005 16:10:46 -0800 Subject: Comment AG4108 SNF 2005-02-20 16:10:45: film in chamber Message-ID: Brown film after Ge anneal. From eenriquez at snf.stanford.edu Wed Feb 23 14:28:29 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Feb 2005 14:28:29 -0800 Subject: Comment AG4108 SNF 2005-02-18 14:10:53: Installed silicide tray Message-ID: Istalled oxidation tray. From eenriquez at snf.stanford.edu Wed Feb 23 14:31:41 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Feb 2005 14:31:41 -0800 Subject: Comment AG4108 SNF 2005-02-23 14:31:40: Installed oxidation tray. Message-ID: Also cleaned the quartz chamber with DI water and IPA From uli at snf.stanford.edu Thu Feb 24 14:43:17 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 24 Feb 2005 14:43:17 -0800 Subject: Comment AG4108 SNF 2005-02-20 16:10:45: film in chamber Message-ID: Elmer cleaned it From eenriquez at snf.stanford.edu Fri Feb 25 13:44:27 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Feb 2005 13:44:27 -0800 Subject: Comment AG4108 SNF 2005-02-23 14:31:40: Installed oxidation tray. Message-ID: Installed silicide tray From eenriquez at snf.stanford.edu Fri Feb 25 13:44:49 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Feb 2005 13:44:49 -0800 Subject: Comment AG4108 SNF 2005-02-25 13:44:49: Installed silicide tray. Message-ID: From uli at snf.stanford.edu Fri Feb 25 15:40:15 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 25 Feb 2005 15:40:15 -0800 Subject: Comment AG4108 SNF 2005-02-06 00:59:36: graph Message-ID: back to 145A oxide, same recipe, RTO 1150C 30sec