Comment AG4108 SNF 2005-02-04 17:46:31: RTO test result

uli at snf.stanford.edu uli at snf.stanford.edu
Fri Feb 4 17:46:32 PST 2005


I ran my standard RTO 1150C 30sec recipe. I used to get 140 A, today, I measured 115A  oxide.




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