Problem AG4108 SNF 2005-02-04 18:02:48: Temp. problem?

uli at snf.stanford.edu uli at snf.stanford.edu
Fri Feb 4 18:02:48 PST 2005


I ran my standard RTO 1150C 30sec recipe. I used to get 140 A, today, I measured 115A  oxide.
There might be a temperature problem




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