From eenriquez at snf.stanford.edu Thu Jan 6 10:10:12 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 6 Jan 2005 10:10:12 -0800 Subject: Comment AG4108 SNF 2004-12-07 08:43:18: Installed silicide tray Message-ID: installed oxidation tray From eenriquez at snf.stanford.edu Thu Jan 6 10:10:32 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 6 Jan 2005 10:10:32 -0800 Subject: Comment AG4108 SNF 2005-01-06 10:10:32: Installed oxidation tray Message-ID: From eenriquez at snf.stanford.edu Fri Jan 7 15:00:12 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 7 Jan 2005 15:00:12 -0800 Subject: Shutdown AG4108 SNF 2005-01-07 15:00:12: No chamber cooling water. Message-ID: From eenriquez at snf.stanford.edu Fri Jan 7 15:03:29 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 7 Jan 2005 15:03:29 -0800 Subject: Shutdown AG4108 SNF 2005-01-07 15:00:12: No chamber cooling water. Message-ID: Found the water chiller/ recirculator is missing. Temporarily connected to the process cooling water loop to allow the user to run the tool. From raghav at snf.stanford.edu Wed Jan 26 17:23:44 2005 From: raghav at snf.stanford.edu (raghav at snf.stanford.edu) Date: Wed, 26 Jan 2005 17:23:44 -0800 Subject: Problem AG4108 SNF 2005-01-26 17:23:44: temperature can't be ramped up over 800C Message-ID: In the RAMP and STEADY step, temperture fail to the target value 1000C. From uli at snf.stanford.edu Thu Jan 27 11:09:34 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 27 Jan 2005 11:09:34 -0800 Subject: Shutdown AG4108 SNF 2005-01-27 11:09:33: supply cooling water is off Message-ID: supply cooling water reads zero and chamber clean is needed From eenriquez at snf.stanford.edu Thu Jan 27 15:30:49 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 27 Jan 2005 15:30:49 -0800 Subject: Shutdown AG4108 SNF 2005-01-27 11:09:33: supply cooling water is off Message-ID: Most of the water flow was diverted through the DI water filter loop. Adjusted the DI water bypass loop flow. Also wet cleaned the chamber. From uli at snf.stanford.edu Thu Jan 27 17:17:25 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 27 Jan 2005 17:17:25 -0800 Subject: Shutdown AG4108 SNF 2005-01-27 17:17:25: does not heat up to set temp Message-ID: