Shutdown AG4108 SNF 2005-01-07 15:00:12: No chamber cooling water.

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jan 7 15:03:29 PST 2005

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Found the water chiller/ recirculator is missing.  Temporarily connected to the process cooling water loop to allow the user to run the tool.

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Next message: Problem AG4108 SNF 2005-01-26 17:23:44: temperature can't be ramped up over 800C
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