From uli at snf.stanford.edu  Wed Jul 13 13:56:14 2005
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Wed, 13 Jul 2005 13:56:14 -0700
Subject: Problem AG4108 SNF 2005-07-13 13:56:13: film in chamber
Message-ID: <mailman.310.1356280551.3222.ag4108-pcs@snf.stanford.edu>

Very thin film, shape of a ring.



From uli at snf.stanford.edu  Wed Jul 13 14:06:55 2005
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Wed, 13 Jul 2005 14:06:55 -0700
Subject: Comment AG4108 SNF 2005-07-13 14:06:54: green enable light is not working
Message-ID: <mailman.311.1356280551.3222.ag4108-pcs@snf.stanford.edu>




From uli at snf.stanford.edu  Wed Jul 13 15:04:16 2005
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Wed, 13 Jul 2005 15:04:16 -0700
Subject: Comment AG4108 SNF 2005-05-27 16:15:42: Installed silicide tray and cassette.
Message-ID: <mailman.312.1356280551.3222.ag4108-pcs@snf.stanford.edu>

I think, oxide tray has been installed since June 9.



From uli at snf.stanford.edu  Wed Jul 13 15:04:58 2005
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Wed, 13 Jul 2005 15:04:58 -0700
Subject: Comment AG4108 SNF 2005-07-13 15:04:57: oxide tray is installed
Message-ID: <mailman.313.1356280551.3222.ag4108-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu Jul 14 22:53:05 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 14 Jul 2005 22:53:05 -0700
Subject: Problem AG4108 SNF 2005-07-13 13:56:13: film in chamber
Message-ID: <mailman.314.1356280551.3222.ag4108-pcs@snf.stanford.edu>

wiped down chamber with ipa.



From riteshj at snf.stanford.edu  Mon Jul 18 17:39:26 2005
From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu)
Date: Mon, 18 Jul 2005 17:39:26 -0700
Subject: Problem AG4108 SNF 2005-07-18 17:39:25: brownish disk on the roof of the chamber
Message-ID: <mailman.315.1356280551.3222.ag4108-pcs@snf.stanford.edu>

there seems to be a brownish disk right above where the wafer wud be in the chamber.



From robinhmb at yahoo.com  Tue Jul 19 14:07:51 2005
From: robinhmb at yahoo.com (Robin King)
Date: Tue, 19 Jul 2005 14:07:51 -0700 (PDT)
Subject: brownish disk on the roof of the chamber
In-Reply-To: <200507190039.j6J0dXWq007876@smtp3.Stanford.EDU>
Message-ID: <20050719210751.12230.qmail@web54704.mail.yahoo.com>

Just for the record since I was a recent user- the contamination did
not come from our wafers as we do clean device work with no Ge,
silicides, or other materials that outgas or flake off. It would be
good for everyone write in the logbook what materials they're using. 
-Robin

--- riteshj at snf.stanford.edu wrote:

> there seems to be a brownish disk right above where the wafer wud
> be in the chamber.
> 
> 



		
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From eenriquez at snf.stanford.edu  Wed Jul 20 11:07:12 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 20 Jul 2005 11:07:12 -0700
Subject: Problem AG4108 SNF 2005-07-18 17:39:25: brownish disk on the roof of the chamber
Message-ID: <mailman.316.1356280551.3222.ag4108-pcs@snf.stanford.edu>

Cleaned chamber with DI water and IPA.