Problem AG4108 SNF 2005-07-18 17:39:25: brownish disk on the roof of the chamber

riteshj at snf.stanford.edu riteshj at snf.stanford.edu
Mon Jul 18 17:39:26 PDT 2005

Previous message: Comment AG4108 SNF 2005-07-13 15:04:57: oxide tray is installed
Next message: Problem AG4108 SNF 2005-07-18 17:39:25: brownish disk on the roof of the chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

there seems to be a brownish disk right above where the wafer wud be in the chamber.

Previous message: Comment AG4108 SNF 2005-07-13 15:04:57: oxide tray is installed
Next message: Problem AG4108 SNF 2005-07-18 17:39:25: brownish disk on the roof of the chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the AG4108-pcs mailing list