brownish disk on the roof of the chamber

Robin King robinhmb at
Tue Jul 19 14:07:51 PDT 2005

Just for the record since I was a recent user- the contamination did
not come from our wafers as we do clean device work with no Ge,
silicides, or other materials that outgas or flake off. It would be
good for everyone write in the logbook what materials they're using. 

--- riteshj at wrote:

> there seems to be a brownish disk right above where the wafer wud
> be in the chamber.

Start your day with Yahoo! - make it your home page 

More information about the AG4108-pcs mailing list