Shutdown AG4108 SNF 2005-03-02 13:55:03: Wafer broke in Chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Mar 2 15:05:15 PST 2005


Vacuum broken pieces and wiped down the chamber with DI water and IPA.  Also installed  the oxidation tray and cassettes.




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