From eenriquez at snf.stanford.edu Mon May 2 11:20:26 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 May 2005 11:20:26 -0700 Subject: Comment AG4108 SNF 2005-05-02 11:20:25: Installed silicide tray Message-ID: From eenriquez at snf.stanford.edu Wed May 4 15:18:51 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 May 2005 15:18:51 -0700 Subject: Comment AG4108 SNF 2005-05-02 11:20:25: Installed silicide tray Message-ID: Installed oxidation tray From eenriquez at snf.stanford.edu Wed May 4 15:19:10 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 May 2005 15:19:10 -0700 Subject: Comment AG4108 SNF 2005-05-04 15:19:09: Installed oxidation tray Message-ID: From uli at snf.stanford.edu Thu May 5 11:04:22 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 5 May 2005 11:04:22 -0700 Subject: Shutdown AG4108 SNF 2005-05-05 11:04:21: chamber has brown film Message-ID: From cbaxter at snf.stanford.edu Thu May 5 16:44:54 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 5 May 2005 16:44:54 -0700 Subject: Shutdown AG4108 SNF 2005-05-05 11:04:21: chamber has brown film Message-ID: cleaned chamber with ipa and also changed tray to oxide. From cbaxter at snf.stanford.edu Thu May 5 16:45:42 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 5 May 2005 16:45:42 -0700 Subject: Comment AG4108 SNF 2005-05-05 16:45:41: oxide tray is installed Message-ID: From eenriquez at snf.stanford.edu Mon May 9 16:53:13 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 May 2005 16:53:13 -0700 Subject: Comment AG4108 SNF 2005-05-05 16:45:41: oxide tray is installed Message-ID: Installed silicide tray. From eenriquez at snf.stanford.edu Mon May 9 16:53:40 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 May 2005 16:53:40 -0700 Subject: Comment AG4108 SNF 2005-05-09 16:53:39: Installed silicide tray Message-ID: From eenriquez at snf.stanford.edu Mon May 9 16:53:51 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 May 2005 16:53:51 -0700 Subject: Comment AG4108 SNF 2005-05-04 15:19:09: Installed oxidation tray Message-ID: From pethe at snf.stanford.edu Tue May 10 02:11:29 2005 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Tue, 10 May 2005 02:11:29 -0700 Subject: Problem AG4108 SNF 2005-05-10 02:11:28: brown film in chamber Message-ID: From uli at snf.stanford.edu Tue May 10 16:13:38 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 10 May 2005 16:13:38 -0700 Subject: Problem AG4108 SNF 2005-05-10 02:11:28: brown film in chamber Message-ID: chamber clean is not necessary From cbaxter at snf.stanford.edu Tue May 10 17:12:01 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 10 May 2005 17:12:01 -0700 Subject: Comment AG4108 SNF 2005-05-10 17:12:00: changed tray to oxide. Message-ID: From eenriquez at snf.stanford.edu Wed May 11 08:37:40 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 May 2005 08:37:40 -0700 Subject: Comment AG4108 SNF 2005-05-09 16:53:39: Installed silicide tray Message-ID: Ceasar installed the oxidation tray From eenriquez at snf.stanford.edu Fri May 20 14:53:25 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 May 2005 14:53:25 -0700 Subject: Comment AG4108 SNF 2005-05-10 17:12:00: changed tray to oxide. Message-ID: Change tray and cassette to silicide. From eenriquez at snf.stanford.edu Fri May 20 14:54:06 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 May 2005 14:54:06 -0700 Subject: Comment AG4108 SNF 2005-05-20 14:54:05: Changed cassette and tray to silicide Message-ID: From pethe at snf.stanford.edu Sun May 22 15:59:44 2005 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Sun, 22 May 2005 15:59:44 -0700 Subject: Comment AG4108 SNF 2005-05-22 15:59:44: brown film in chamber Message-ID: brown film depsoited in the chamber. noticed it before my run! From pethe at snf.stanford.edu Sun May 22 16:32:45 2005 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Sun, 22 May 2005 16:32:45 -0700 Subject: Problem AG4108 SNF 2005-05-22 16:32:44: NH3/NF3 out of range Message-ID: The feedback of NH3 during the processing step was less. It started at full scale and ided out and then my process stopped. From eenriquez at snf.stanford.edu Mon May 23 16:23:52 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 May 2005 16:23:52 -0700 Subject: Problem AG4108 SNF 2005-05-22 16:32:44: NH3/NF3 out of range Message-ID: Flow rate too high for the line pressure. Increase delivery pressure to about 30 psi at the tool. From eenriquez at snf.stanford.edu Tue May 24 13:18:46 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 May 2005 13:18:46 -0700 Subject: Comment AG4108 SNF 2005-05-22 15:59:44: brown film in chamber Message-ID: Cleaned chamber From eenriquez at snf.stanford.edu Tue May 24 13:19:17 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 May 2005 13:19:17 -0700 Subject: Comment AG4108 SNF 2005-05-20 14:54:05: Changed cassette and tray to silicide Message-ID: Changed cassette and tray to oxidation From eenriquez at snf.stanford.edu Tue May 24 13:20:25 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 May 2005 13:20:25 -0700 Subject: Comment AG4108 SNF 2005-05-24 13:20:25: Oxidation tray and cassette installed Message-ID: From eenriquez at snf.stanford.edu Fri May 27 16:15:39 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 May 2005 16:15:39 -0700 Subject: Comment AG4108 SNF 2005-05-24 13:20:25: Oxidation tray and cassette installed Message-ID: Installed silicide tray and cassette. From eenriquez at snf.stanford.edu Fri May 27 16:15:45 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 27 May 2005 16:15:45 -0700 Subject: Comment AG4108 SNF 2005-05-27 16:15:42: Installed silicide tray and cassette. Message-ID: