Shutdown AG4108 SNF 2005-05-05 11:04:21: chamber has brown film

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu May 5 16:44:54 PDT 2005

Previous message: Shutdown AG4108 SNF 2005-05-05 11:04:21: chamber has brown film
Next message: Comment AG4108 SNF 2005-05-05 16:45:41: oxide tray is installed
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

cleaned chamber with ipa and also changed tray to
oxide.

Previous message: Shutdown AG4108 SNF 2005-05-05 11:04:21: chamber has brown film
Next message: Comment AG4108 SNF 2005-05-05 16:45:41: oxide tray is installed
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the AG4108-pcs mailing list