Problem AG4108 SNF 2005-05-22 16:32:44: NH3/NF3 out of range

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon May 23 16:23:52 PDT 2005


Flow rate too high for the line pressure.  Increase delivery pressure to about 30 psi at the tool.




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