Comment AG4108 SNF 2005-05-22 15:59:44: brown film in chamber
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue May 24 13:18:46 PDT 2005
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Comment AG4108 SNF 2005-05-22 15:59:44: brown film in chamber
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Problem AG4108 SNF 2005-05-22 16:32:44: NH3/NF3 out of range
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Cleaned chamber
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Comment AG4108 SNF 2005-05-22 15:59:44: brown film in chamber
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Problem AG4108 SNF 2005-05-22 16:32:44: NH3/NF3 out of range
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