From uli at snf.stanford.edu Thu Nov 3 15:06:05 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 3 Nov 2005 15:06:05 -0800 Subject: Problem AG4108 SNF 2005-11-03 15:06:04: film in chamber, nice colors Message-ID: From uli at snf.stanford.edu Thu Nov 3 16:08:21 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 3 Nov 2005 16:08:21 -0800 Subject: Problem AG4108 SNF 2005-11-03 15:06:04: film in chamber, nice colors Message-ID: Elmer was so nice and cleaned the chamber right away! From ratiug at snf.stanford.edu Thu Nov 3 17:34:59 2005 From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu) Date: Thu, 3 Nov 2005 17:34:59 -0800 Subject: Shutdown AG4108 SNF 2005-11-03 17:34:58: temperature didn't reach the set point Message-ID: RTO process at 950C. Temperature didn't reach the setup at steady step, and the system failed. I tried the process for thress times. The same situation occurred. From eenriquez at snf.stanford.edu Fri Nov 4 12:34:50 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Nov 2005 12:34:50 -0800 Subject: Shutdown AG4108 SNF 2005-11-03 17:34:58: temperature didn't reach the set point Message-ID: The system had been reset. From eenriquez at snf.stanford.edu Fri Nov 4 13:48:22 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Nov 2005 13:48:22 -0800 Subject: Comment AG4108 SNF 2005-10-25 09:48:30: Installed oxidation tray and cassettes Message-ID: Installed silicide tray and cassettes From eenriquez at snf.stanford.edu Fri Nov 4 13:48:34 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Nov 2005 13:48:34 -0800 Subject: Comment AG4108 SNF 2005-11-04 13:48:34: Installed silicide tray and cassettes Message-ID: From ratiug at snf.stanford.edu Sun Nov 6 13:19:16 2005 From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu) Date: Sun, 6 Nov 2005 13:19:16 -0800 Subject: Problem AG4108 SNF 2005-11-06 13:19:14: temperature fail to reach the setpoint at steady step Message-ID: the same problem I reported last Thursday. From pethe at snf.stanford.edu Sun Nov 6 22:35:14 2005 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Sun, 6 Nov 2005 22:35:14 -0800 Subject: Shutdown AG4108 SNF 2005-11-06 22:35:14: Broke carrier wafer in chamber Message-ID: From eenriquez at snf.stanford.edu Mon Nov 7 09:00:50 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 7 Nov 2005 09:00:50 -0800 Subject: Shutdown AG4108 SNF 2005-11-06 22:35:14: Broke carrier wafer in chamber Message-ID: Wet cleaned the chamber. From eenriquez at snf.stanford.edu Tue Nov 8 14:13:20 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Nov 2005 14:13:20 -0800 Subject: Comment AG4108 SNF 2005-11-04 13:48:34: Installed silicide tray and cassettes Message-ID: Installed oxidation tray and cassettes From eenriquez at snf.stanford.edu Tue Nov 8 14:13:36 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Nov 2005 14:13:36 -0800 Subject: Comment AG4108 SNF 2005-11-08 14:13:34: Installed oxidation tray and cassettes Message-ID: From uli at snf.stanford.edu Tue Nov 8 16:51:09 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 8 Nov 2005 16:51:09 -0800 Subject: Shutdown AG4108 SNF 2005-11-08 16:51:08: piece in chamber Message-ID: From uli at snf.stanford.edu Wed Nov 9 16:30:40 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 9 Nov 2005 16:30:40 -0800 Subject: Shutdown AG4108 SNF 2005-11-09 16:30:40: supply cooling water is off Message-ID: From eenriquez at snf.stanford.edu Thu Nov 10 14:39:45 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Nov 2005 14:39:45 -0800 Subject: Shutdown AG4108 SNF 2005-11-09 16:30:40: supply cooling water is off Message-ID: Cleaned strainer filter in the chiller pump. From eenriquez at snf.stanford.edu Thu Nov 10 14:40:23 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Nov 2005 14:40:23 -0800 Subject: Shutdown AG4108 SNF 2005-11-08 16:51:08: piece in chamber Message-ID: Installed clean quartz chamber. From eenriquez at snf.stanford.edu Thu Nov 10 14:41:27 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Nov 2005 14:41:27 -0800 Subject: Comment AG4108 SNF 2005-11-08 14:13:34: Installed oxidation tray and cassettes Message-ID: Installed silicide tray and cassettes From eenriquez at snf.stanford.edu Thu Nov 10 14:41:47 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Nov 2005 14:41:47 -0800 Subject: Comment AG4108 SNF 2005-11-10 14:41:46: Installed silicide tray and cassettes Message-ID: From uli at snf.stanford.edu Thu Nov 10 15:45:45 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 10 Nov 2005 15:45:45 -0800 Subject: Problem AG4108 SNF 2005-11-10 15:45:43: Green "Enable" light does not work. Message-ID: From uli at snf.stanford.edu Thu Nov 10 18:27:02 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 10 Nov 2005 18:27:02 -0800 Subject: Problem AG4108 SNF 2005-11-06 13:19:14: temperature fail to reach the setpoint at steady step Message-ID: I ran my RTO 30 sec 1150C program, the system is working fine for me! From eenriquez at snf.stanford.edu Fri Nov 11 14:46:39 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Nov 2005 14:46:39 -0800 Subject: Problem AG4108 SNF 2005-11-10 15:45:43: Green "Enable" light does not work. Message-ID: Replaced defective light bulb From eenriquez at snf.stanford.edu Mon Nov 14 14:46:12 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Nov 2005 14:46:12 -0800 Subject: Comment AG4108 SNF 2005-11-10 14:41:46: Installed silicide tray and cassettes Message-ID: Installed oxidation tray and cassettes From eenriquez at snf.stanford.edu Mon Nov 14 14:46:32 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Nov 2005 14:46:32 -0800 Subject: Comment AG4108 SNF 2005-11-14 14:46:28: Installed oxidation tray and cassettes Message-ID: From eenriquez at snf.stanford.edu Fri Nov 18 08:43:05 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 18 Nov 2005 08:43:05 -0800 Subject: Comment AG4108 SNF 2005-11-14 14:46:28: Installed oxidation tray and cassettes Message-ID: Installed silicide tray and cassettes From eenriquez at snf.stanford.edu Fri Nov 18 08:43:18 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 18 Nov 2005 08:43:18 -0800 Subject: Comment AG4108 SNF 2005-11-18 08:43:17: Installed silicide tray and cassettes Message-ID: From uli at snf.stanford.edu Fri Nov 18 14:51:17 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 18 Nov 2005 14:51:17 -0800 Subject: Problem AG4108 SNF 2005-11-18 14:51:16: film in chamber Message-ID: From fengj at snf.stanford.edu Fri Nov 18 17:46:03 2005 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Fri, 18 Nov 2005 17:46:03 -0800 Subject: Problem AG4108 SNF 2005-11-18 17:46:02: Ran out of recorder paper Message-ID: From anayfeh at snf.stanford.edu Sun Nov 20 11:34:18 2005 From: anayfeh at snf.stanford.edu (anayfeh at snf.stanford.edu) Date: Sun, 20 Nov 2005 11:34:18 -0800 Subject: Shutdown AG4108 SNF 2005-11-20 11:34:17: Top of Chamber Brown Message-ID: Needs Cleaning From eenriquez at snf.stanford.edu Mon Nov 21 13:07:55 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Nov 2005 13:07:55 -0800 Subject: Shutdown AG4108 SNF 2005-11-20 11:34:17: Top of Chamber Brown Message-ID: The chamber was clean but I wet cleaned it anyway. From eenriquez at snf.stanford.edu Mon Nov 21 13:08:37 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Nov 2005 13:08:37 -0800 Subject: Problem AG4108 SNF 2005-11-18 14:51:16: film in chamber Message-ID: Wet cleaned chamber. From eenriquez at snf.stanford.edu Mon Nov 21 13:09:51 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Nov 2005 13:09:51 -0800 Subject: Problem AG4108 SNF 2005-11-18 17:46:02: Ran out of recorder paper Message-ID: Placed a new roll of recorder paper next to the printer From seymour at snf.stanford.edu Wed Nov 23 11:33:59 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 23 Nov 2005 11:33:59 -0800 Subject: Comment AG4108 SNF 2005-11-23 11:33:58: tray change Message-ID: With Ms. Robin's K. great help I was able to change tray to oxide She offered to change cassets. From nvgirish at snf.stanford.edu Thu Nov 24 15:24:23 2005 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Thu, 24 Nov 2005 15:24:23 -0800 Subject: Shutdown AG4108 SNF 2005-11-24 15:24:23: AG4108 down - Wafer pieces in chamber Message-ID: Hi One of my clean Si test wafers broke inside the chamber while doing a test run (1000C, 30sec, 75C/s ramp). One clean test wafer is still on the retrieval arm (I cannot unload it). Sorry for the incovenience caused Girish From eenriquez at snf.stanford.edu Mon Nov 28 09:46:28 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2005 09:46:28 -0800 Subject: Shutdown AG4108 SNF 2005-11-24 15:24:23: AG4108 down - Wafer pieces in chamber Message-ID: cleaned up chamber, cycled wafers with no problem. From cmfaulkn at snf.stanford.edu Mon Nov 28 10:58:38 2005 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Mon, 28 Nov 2005 10:58:38 -0800 Subject: Shutdown AG4108 SNF 2005-11-28 10:58:38: robot arm dropping wafers on unload Message-ID: From eenriquez at snf.stanford.edu Mon Nov 28 15:48:46 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2005 15:48:46 -0800 Subject: Comment AG4108 SNF 2005-11-28 15:48:46: No vacuum at the robot arm Message-ID: Vacuum pump works OK. Looks like the vacuum line is restricted inside the robot body assembly. From eenriquez at snf.stanford.edu Tue Nov 29 15:49:37 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 29 Nov 2005 15:49:37 -0800 Subject: Shutdown AG4108 SNF 2005-11-28 10:58:38: robot arm dropping wafers on unload Message-ID: Vacuum solenoid was stuck close. Actuated the solenoid valve manually several times. Cycled a dozen dummy wafers with no problem. From eenriquez at snf.stanford.edu Tue Nov 29 15:49:47 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 29 Nov 2005 15:49:47 -0800 Subject: Comment AG4108 SNF 2005-11-28 15:48:46: No vacuum at the robot arm Message-ID: Vacuum solenoid was stuck close. Actuated the solenoid valve manually several times. Cycled a dozen dummy wafers with no problem. From robinhmb at yahoo.com Tue Nov 29 21:27:04 2005 From: robinhmb at yahoo.com (Robin King) Date: Tue, 29 Nov 2005 21:27:04 -0800 (PST) Subject: AG4108 SNF 2005-11-28 10:58:38: robot arm dropping wafers In-Reply-To: <200511292349.jATNnjd5003893@smtp2.Stanford.EDU> Message-ID: <20051130052704.51710.qmail@web54709.mail.yahoo.com> We ran about 25 wafers with no problems. Thanks Elmer! --- eenriquez at snf.stanford.edu wrote: > Vacuum solenoid was stuck close. Actuated the solenoid valve > manually several times. Cycled a dozen dummy wafers with no > problem. > > __________________________________ Yahoo! Mail - PC Magazine Editors' Choice 2005 http://mail.yahoo.com From nvgirish at snf.stanford.edu Wed Nov 30 17:44:37 2005 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Wed, 30 Nov 2005 17:44:37 -0800 Subject: Problem AG4108 SNF 2005-11-30 17:44:36: Screen problem! Message-ID: Hi all The screen has hung and is not responding. The receive cassette still shows a light even when cassette is in place. Sorry for the inconvenience Girish