Shutdown AG4108 SNF 2005-11-06 22:35:14: Broke carrier wafer in chamber
pethe at snf.stanford.edu
pethe at snf.stanford.edu
Sun Nov 6 22:35:14 PST 2005
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Problem AG4108 SNF 2005-11-06 13:19:14: temperature fail to reach the setpoint at steady step
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Shutdown AG4108 SNF 2005-11-06 22:35:14: Broke carrier wafer in chamber
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Problem AG4108 SNF 2005-11-06 13:19:14: temperature fail to reach the setpoint at steady step
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Shutdown AG4108 SNF 2005-11-06 22:35:14: Broke carrier wafer in chamber
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