Comment AG4108 SNF 2005-11-08 14:13:34: Installed oxidation tray and cassettes
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Nov 8 14:13:36 PST 2005
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Shutdown AG4108 SNF 2005-11-06 22:35:14: Broke carrier wafer in chamber
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Comment AG4108 SNF 2005-11-08 14:13:34: Installed oxidation tray and cassettes
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Shutdown AG4108 SNF 2005-11-06 22:35:14: Broke carrier wafer in chamber
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Comment AG4108 SNF 2005-11-08 14:13:34: Installed oxidation tray and cassettes
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