Problem AG4108 SNF 2005-11-06 13:19:14: temperature fail to reach the setpoint at steady step

uli at snf.stanford.edu uli at snf.stanford.edu
Thu Nov 10 18:27:02 PST 2005

Previous message: Problem AG4108 SNF 2005-11-06 13:19:14: temperature fail to reach the setpoint at steady step
Next message: Shutdown AG4108 SNF 2005-11-06 22:35:14: Broke carrier wafer in chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

I ran my RTO 30 sec 1150C program, the system is working fine for me!

Previous message: Problem AG4108 SNF 2005-11-06 13:19:14: temperature fail to reach the setpoint at steady step
Next message: Shutdown AG4108 SNF 2005-11-06 22:35:14: Broke carrier wafer in chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the AG4108-pcs mailing list