Shutdown AG4108 SNF 2005-11-24 15:24:23: AG4108 down - Wafer pieces in chamber

nvgirish at snf.stanford.edu nvgirish at snf.stanford.edu
Thu Nov 24 15:24:23 PST 2005


Hi
     One of my clean Si test wafers broke inside the chamber while doing a test run (1000C, 30sec, 75C/s ramp). One clean test wafer is still on the retrieval arm (I cannot unload it). 
Sorry for the incovenience caused
Girish




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