Shutdown AG4108 SNF 2005-11-28 10:58:38: robot arm dropping wafers on unload

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Nov 29 15:49:37 PST 2005


Vacuum solenoid was stuck close. Actuated the solenoid valve manually several times.  Cycled a dozen dummy wafers with no problem.




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