Comment AG4108 SNF 2005-11-28 15:48:46: No vacuum at the robot arm

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Nov 29 15:49:47 PST 2005

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Vacuum solenoid was stuck close. Actuated the solenoid valve manually several times.  Cycled a dozen dummy wafers with no problem.

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