AG4108 SNF 2005-11-28 10:58:38: robot arm dropping wafers

[Robin King]

We ran about 25 wafers with no problems.  Thanks Elmer!

--- eenriquez at snf.stanford.edu wrote:

> Vacuum solenoid was stuck close. Actuated the solenoid valve
> manually several times.  Cycled a dozen dummy wafers with no
> problem.
> 
> 



	
		
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