From eenriquez at snf.stanford.edu Thu Sep 1 15:27:37 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 Sep 2005 15:27:37 -0700 Subject: Comment AG4108 SNF 2005-08-31 16:40:41: Installed oxidation tray and cassettes Message-ID: Installed silicide tray From eenriquez at snf.stanford.edu Thu Sep 1 15:28:20 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 Sep 2005 15:28:20 -0700 Subject: Comment AG4108 SNF 2005-09-01 15:28:20: Install silicide tray and cassettes Message-ID: From riteshj at snf.stanford.edu Thu Sep 1 18:04:21 2005 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Thu, 1 Sep 2005 18:04:21 -0700 Subject: Shutdown AG4108 SNF 2005-09-01 18:04:21: wafers stuck in the chamber Message-ID: process aborted as temperature was too low (out of range) and wafer is in the chamber From riteshj at snf.stanford.edu Thu Sep 1 19:28:15 2005 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Thu, 1 Sep 2005 19:28:15 -0700 Subject: Problem AG4108 SNF 2005-09-01 19:28:15: plotter pen out of ink Message-ID: From cbaxter at snf.stanford.edu Thu Sep 1 20:21:35 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 1 Sep 2005 20:21:35 -0700 Subject: Shutdown AG4108 SNF 2005-09-01 18:04:21: wafers stuck in the chamber Message-ID: mnaually command robot to unload wafer. From cbaxter at snf.stanford.edu Thu Sep 1 20:21:49 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 1 Sep 2005 20:21:49 -0700 Subject: Problem AG4108 SNF 2005-09-01 19:28:15: plotter pen out of ink Message-ID: From riteshj at snf.stanford.edu Fri Sep 2 15:50:24 2005 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Fri, 2 Sep 2005 15:50:24 -0700 Subject: Problem AG4108 SNF 2005-09-02 15:50:22: Plotter pen out of ink Message-ID: From eenriquez at snf.stanford.edu Tue Sep 6 09:33:40 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 Sep 2005 09:33:40 -0700 Subject: Problem AG4108 SNF 2005-09-02 15:50:22: Plotter pen out of ink Message-ID: Replaced pen. From eenriquez at snf.stanford.edu Tue Sep 13 07:57:06 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Sep 2005 07:57:06 -0700 Subject: Problem AG4108 SNF 2005-08-30 13:47:24: No N2O Message-ID: N2O is now available. From uli at snf.stanford.edu Wed Sep 14 14:31:04 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 14 Sep 2005 14:31:04 -0700 Subject: Comment AG4108 SNF 2005-07-13 14:06:54: green enable light is not working Message-ID: it is working! From eenriquez at snf.stanford.edu Fri Sep 16 08:01:42 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Sep 2005 08:01:42 -0700 Subject: Comment AG4108 SNF 2005-09-01 15:28:20: Install silicide tray and cassettes Message-ID: Installed oxidation tray and cassettes. From eenriquez at snf.stanford.edu Fri Sep 16 08:02:04 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Sep 2005 08:02:04 -0700 Subject: Comment AG4108 SNF 2005-09-16 08:02:04: Installed oxidation tray and cassettes Message-ID: From chion at snf.stanford.edu Mon Sep 19 23:50:05 2005 From: chion at snf.stanford.edu (chion at snf.stanford.edu) Date: Mon, 19 Sep 2005 23:50:05 -0700 Subject: Problem AG4108 SNF 2005-09-19 23:50:04: NH3 running low Message-ID: Even the flow was lowered to 3L from 5L per Elmer's suggestion, the process still aborted. The pressure guage on the side panel showed a 24.X reading, which should be more than enoughfrom the past experience (flowing even 5L). From eenriquez at snf.stanford.edu Thu Sep 22 13:31:49 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Sep 2005 13:31:49 -0700 Subject: Comment AG4108 SNF 2005-09-16 14:03:23: Installed silicide tray and cassettes Message-ID: Installed oxidation tray and cassettes From eenriquez at snf.stanford.edu Thu Sep 22 13:32:21 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Sep 2005 13:32:21 -0700 Subject: Comment AG4108 SNF 2005-09-22 13:32:20: Installed oxidation tray and cassettes Message-ID: From eenriquez at snf.stanford.edu Thu Sep 22 13:34:30 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Sep 2005 13:34:30 -0700 Subject: Problem AG4108 SNF 2005-09-19 23:50:04: NH3 running low Message-ID: Increased NH3 delivery pressure to 40 psi From eenriquez at snf.stanford.edu Fri Sep 23 15:00:49 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Sep 2005 15:00:49 -0700 Subject: Comment AG4108 SNF 2005-09-22 13:32:20: Installed oxidation tray and cassettes Message-ID: Installed silicide tray and cassettes From eenriquez at snf.stanford.edu Fri Sep 23 15:01:08 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Sep 2005 15:01:08 -0700 Subject: Comment AG4108 SNF 2005-09-23 15:01:07: Installed silicide tray and cassettes Message-ID: From eenriquez at snf.stanford.edu Wed Sep 28 15:39:10 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Sep 2005 15:39:10 -0700 Subject: Comment AG4108 SNF 2005-09-23 15:01:07: Installed silicide tray and cassettes Message-ID: Installed oxidation tray and cassettes From eenriquez at snf.stanford.edu Wed Sep 28 15:39:39 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Sep 2005 15:39:39 -0700 Subject: Comment AG4108 SNF 2005-09-28 15:39:37: Installed oxidation tray and cassettes Message-ID: From uli at snf.stanford.edu Thu Sep 29 15:01:27 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 29 Sep 2005 15:01:27 -0700 Subject: Problem AG4108 SNF 2005-09-29 15:01:25: film in chamber Message-ID: From eenriquez at snf.stanford.edu Thu Sep 29 15:48:43 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 29 Sep 2005 15:48:43 -0700 Subject: Problem AG4108 SNF 2005-09-29 15:01:25: film in chamber Message-ID: Wet cleaned the chamber