Problem AG4108 SNF 2005-09-01 19:28:15: plotter pen out of ink
riteshj at snf.stanford.edu
riteshj at snf.stanford.edu
Thu Sep 1 19:28:15 PDT 2005
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Shutdown AG4108 SNF 2005-09-01 18:04:21: wafers stuck in the chamber
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Problem AG4108 SNF 2005-09-01 19:28:15: plotter pen out of ink
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Shutdown AG4108 SNF 2005-09-01 18:04:21: wafers stuck in the chamber
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Problem AG4108 SNF 2005-09-01 19:28:15: plotter pen out of ink
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