From caudillo at snf.stanford.edu Mon Apr 3 17:44:10 2006 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Mon, 3 Apr 2006 17:44:10 -0700 Subject: Problem AG4108 SNF 2006-04-03 17:43:52: two wfs stuck /lamp Message-ID: 2 wafers stuck in the transport loop and lamp is not turning on. From eenriquez at snf.stanford.edu Mon Apr 3 22:30:38 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 Apr 2006 22:30:38 -0700 Subject: Problem AG4108 SNF 2006-04-03 17:43:52: two wfs stuck /lamp Message-ID: Cycled 5 wafers with no problems. User's recipe was set on TC control instead of pyrometer control. From dansanga at snf.stanford.edu Wed Apr 5 00:37:04 2006 From: dansanga at snf.stanford.edu (dansanga at snf.stanford.edu) Date: Wed, 5 Apr 2006 00:37:04 -0700 Subject: Problem AG4108 SNF 2006-04-05 00:37:04: our wafer stuck in chamber Message-ID: looks like robotic arm had problem in manual mode From cbaxter at snf.stanford.edu Wed Apr 5 09:05:13 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 5 Apr 2006 09:05:13 -0700 Subject: Problem AG4108 SNF 2006-04-05 00:37:04: our wafer stuck in chamber Message-ID: recovered stuck wafer inside the chamber, cycled dummy wafer w/o a problem. From chaseonline at chaseonline.chase.com Tue Apr 11 07:32:36 2006 From: chaseonline at chaseonline.chase.com (Chase Card Services Online Services Team) Date: Tue, 11 Apr 2006 09:32:36 -0500 Subject: Notification of Limited Account Access Message-ID: <200604111432.k3BEWa7A000790@molitor.simplecom.net> An HTML attachment was scrubbed... URL: From king at snf.stanford.edu Thu Apr 20 02:33:22 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 20 Apr 2006 02:33:22 -0700 Subject: Problem AG4108 SNF 2006-04-20 02:33:22: occasional stopping Message-ID: in the middle a stack of wafers during ramp up even though other wafers were perfect (i.e. not always repeatable) "Temp too high" error and also a pyrometer temp error. Chiller was full. Happens for different processes. From eenriquez at snf.stanford.edu Sun Apr 23 10:13:23 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Apr 2006 10:13:23 -0700 Subject: Problem AG4108 SNF 2006-04-20 02:33:22: occasional stopping Message-ID: Ran 42 wafers using RTA900 recipe with no problems. It looks like the temperature control parameters still needs to be optimized. For the RTA900 recipe, the temperature varied +10 to -16 degrees C from setpoint. This might be the cause for the occasional run stoppage. From robinhmb at yahoo.com Sun Apr 23 17:28:26 2006 From: robinhmb at yahoo.com (Robin King) Date: Sun, 23 Apr 2006 17:28:26 -0700 (PDT) Subject: Problem AG4108 SNF 2006-04-20 02:33:22: occasional stopping In-Reply-To: <200604231713.k3NHDaJI032338@smtp2.Stanford.EDU> Message-ID: <20060424002826.94505.qmail@web54707.mail.yahoo.com> Thanks Elmer for running a test. When I ran it at 1000C with 20 sec ramp, the temperature profile looked near-ideal for three or four wafers in a row and then on rampup the measured temp would shoot up above the model. We should do it again with staff around. Also, we could use some log sheets to record what people are using. Thanks. --- eenriquez at snf.stanford.edu wrote: > Ran 42 wafers using RTA900 recipe with no problems. It looks like > the temperature control parameters still needs to be optimized. > For the RTA900 recipe, the temperature varied +10 to -16 degrees C > from setpoint. This might be the cause for the occasional run > stoppage. > > __________________________________________________ Do You Yahoo!? Tired of spam? Yahoo! Mail has the best spam protection around http://mail.yahoo.com From emyers at snf.stanford.edu Wed Apr 26 08:18:07 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 26 Apr 2006 08:18:07 -0700 Subject: Comment AG4108 SNF 2006-03-15 22:54:42: System stopped a few times Message-ID: Reviewed problem with Robin. Looks to be recipe related, due to overshoot at steady state. Made recommendations on how to minimized overshoot.