Problem AG4108 SNF 2006-04-03 17:43:52: two wfs stuck /lamp

caudillo at snf.stanford.edu caudillo at snf.stanford.edu
Mon Apr 3 17:44:10 PDT 2006

Next message: Problem AG4108 SNF 2006-04-03 17:43:52: two wfs stuck /lamp
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

2 wafers stuck in the transport loop and lamp is not turning on.

Next message: Problem AG4108 SNF 2006-04-03 17:43:52: two wfs stuck /lamp
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the AG4108-pcs mailing list