Problem AG4108 SNF 2006-04-03 17:43:52: two wfs stuck /lamp

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Apr 3 22:30:38 PDT 2006


Cycled 5 wafers with no problems.  User's recipe was set  on TC control instead of pyrometer control.




More information about the AG4108-pcs mailing list