Problem AG4108 SNF 2006-04-20 02:33:22: occasional stopping

king at snf.stanford.edu king at snf.stanford.edu
Thu Apr 20 02:33:22 PDT 2006


in the middle a stack of wafers during ramp up even though other wafers were perfect (i.e. not always repeatable)  "Temp too high" error and also a pyrometer temp error.  Chiller was full.  Happens for different processes.  




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