Problem AG4108 SNF 2006-04-20 02:33:22: occasional stopping

[eenriquez at snf.stanford.edu]

Ran 42 wafers using RTA900 recipe with no problems.  It looks like the temperature control parameters still needs to be optimized.  For the RTA900 recipe, the temperature varied +10 to -16 degrees C from setpoint.  This might be the cause for the occasional run stoppage.