Problem AG4108 SNF 2006-04-20 02:33:22: occasional stopping

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Sun Apr 23 10:13:23 PDT 2006


Ran 42 wafers using RTA900 recipe with no problems.  It looks like the temperature control parameters still needs to be optimized.  For the RTA900 recipe, the temperature varied +10 to -16 degrees C from setpoint.  This might be the cause for the occasional run stoppage.




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