From eenriquez at snf.stanford.edu Tue Aug 1 13:21:07 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Aug 2006 13:21:07 -0700 Subject: Shutdown AG4108 SNF 2006-07-31 16:59:45: Shutdown status Message-ID: Adjust the user's process parameters to improve the temperature profile. Ran two wafers without a temp fault. Still has a software problem where the run screen is filled with text. The system however runs the process OK and collects all the data. From eenriquez at snf.stanford.edu Tue Aug 1 13:21:39 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Aug 2006 13:21:39 -0700 Subject: Problem AG4108 SNF 2006-07-31 14:20:31: T/C wafer was still in the chamber Message-ID: Sorry. From vipin at snf.stanford.edu Tue Aug 1 22:30:26 2006 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Tue, 1 Aug 2006 22:30:26 -0700 Subject: Problem AG4108 SNF 2006-08-01 22:30:26: Problem Message-ID: Animation on screen is totally screwed up but the process seems to run fine. From mwiemer at snf.stanford.edu Wed Aug 2 11:08:43 2006 From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu) Date: Wed, 2 Aug 2006 11:08:43 -0700 Subject: Comment AG4108 SNF 2006-08-02 11:08:43: Ge Processing Done Message-ID: Clean wafers with unexposed Ge on them have now been processed in the chamber. The chamber must now be switched back to the original one which is clean. The chamber is now POTENTIALLY (though not really) contaminated. This process has been approved by Specmat. From eenriquez at snf.stanford.edu Wed Aug 2 17:43:10 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Aug 2006 17:43:10 -0700 Subject: Shutdown AG4108 SNF 2006-08-02 17:43:09: Need to replace quartzware Message-ID: From eenriquez at snf.stanford.edu Wed Aug 16 15:54:21 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Aug 2006 15:54:21 -0700 Subject: Shutdown AG4108 SNF 2006-08-02 17:43:09: Need to replace quartzware Message-ID: Installed clean quartz chamber and tray. Performed pyrometer calibration. Ran test wafers to verify operation. Process eng needs to run an oxidation test wafer to verify temperature cal. From eenriquez at snf.stanford.edu Wed Aug 16 15:54:41 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Aug 2006 15:54:41 -0700 Subject: Comment AG4108 SNF 2006-08-02 11:08:43: Ge Processing Done Message-ID: Installed clean quartz chamber and tray. Performed pyrometer calibration. Ran test wafers to verify operation. Process eng needs to run an oxidation test wafer to verify temperature cal. From eenriquez at snf.stanford.edu Wed Aug 16 15:55:55 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Aug 2006 15:55:55 -0700 Subject: Problem AG4108 SNF 2006-08-01 22:30:26: Problem Message-ID: Reinstalled previous software version. From eenriquez at snf.stanford.edu Wed Aug 16 15:56:11 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Aug 2006 15:56:11 -0700 Subject: Problem AG4108 SNF 2006-07-31 16:26:51: Software Not Working? Message-ID: Reinstalled previous software version. From eenriquez at snf.stanford.edu Wed Aug 16 15:57:32 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Aug 2006 15:57:32 -0700 Subject: Shutdown AG4108 SNF 2006-08-16 15:57:31: Process eng need to run oxidation test Message-ID: From eenriquez at snf.stanford.edu Fri Aug 18 07:16:01 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 18 Aug 2006 07:16:01 -0700 Subject: Shutdown AG4108 SNF 2006-08-16 15:57:31: Process eng need to run oxidation test Message-ID: From eenriquez at snf.stanford.edu Fri Aug 18 07:25:41 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 18 Aug 2006 07:25:41 -0700 Subject: Problem AG4108 SNF 2006-08-18 07:25:40: Needs process qual. Message-ID: Oxidation test has not been performed. From rwoo at snf.stanford.edu Fri Aug 18 17:21:44 2006 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Fri, 18 Aug 2006 17:21:44 -0700 Subject: Comment AG4108 SNF 2006-08-18 17:21:43: oxidation test results Message-ID: 1150C 30s. Target thickness 120A First Wafer: avg=108 std dev=2.8 Second Wafer: avg=102 std dev=3.9 Third Wafer: avg=115 std dev=3.0 Fourth Wafer: avg=117 std dev=3.8 From ratiug at snf.stanford.edu Sun Aug 27 14:01:13 2006 From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu) Date: Sun, 27 Aug 2006 14:01:13 -0700 Subject: Problem AG4108 SNF 2006-08-27 14:01:12: coolng wafer alarm Message-ID: From ratiug at snf.stanford.edu Sun Aug 27 14:29:06 2006 From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu) Date: Sun, 27 Aug 2006 14:29:06 -0700 Subject: Shutdown AG4108 SNF 2006-08-27 14:29:05: intial temperature is too high Message-ID: I ran a RTO1050 process for 30s, system stopped at the oxidation step and showed initial temp is too high. I removed all my wafers in sending cassette and flat aligner. But one dummy wafer was still inside the process chamber. From cbaxter at snf.stanford.edu Mon Aug 28 10:43:20 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 28 Aug 2006 10:43:20 -0700 Subject: Shutdown AG4108 SNF 2006-08-27 14:29:05: intial temperature is too high Message-ID: Recovered wafer from chamber and run test temp made setpoint w/out problem. From cbaxter at snf.stanford.edu Mon Aug 28 10:43:34 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 28 Aug 2006 10:43:34 -0700 Subject: Shutdown AG4108 SNF 2006-08-27 14:29:05: intial temperature is too high Message-ID: From cbaxter at snf.stanford.edu Mon Aug 28 10:47:38 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 28 Aug 2006 10:47:38 -0700 Subject: Problem AG4108 SNF 2006-08-27 14:01:12: coolng wafer alarm Message-ID: cooling water is flowing ok.. From emyers at snf.stanford.edu Thu Aug 31 10:15:27 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 31 Aug 2006 10:15:27 -0700 Subject: Problem AG4108 SNF 2006-08-18 07:25:40: Needs process qual. Message-ID: Oxidation ran by rwoo on 8/18/06. 1150C, 30 yielded ~118Ang.