Shutdown AG4108 SNF 2006-07-31 16:59:45: Shutdown status

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Aug 1 13:21:07 PDT 2006


Adjust the user's process parameters to improve the temperature profile.  Ran two wafers without a temp fault.  
Still has a software problem where the run screen is filled with text.  The system however runs the process OK and collects all the data.




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