Problem AG4108 SNF 2006-07-31 14:20:31: T/C wafer was still in the chamber
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Aug 1 13:21:39 PDT 2006
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Shutdown AG4108 SNF 2006-07-31 16:59:45: Shutdown status
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Problem AG4108 SNF 2006-08-01 22:30:26: Problem
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Sorry.
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Shutdown AG4108 SNF 2006-07-31 16:59:45: Shutdown status
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Problem AG4108 SNF 2006-08-01 22:30:26: Problem
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