Comment AG4108 SNF 2006-08-02 11:08:43: Ge Processing Done

mwiemer at mwiemer at
Wed Aug 2 11:08:43 PDT 2006

Clean wafers with unexposed Ge on them have now been processed in the chamber. The chamber must now be switched back to the original one which is clean. The chamber is now POTENTIALLY (though not really) contaminated. This process has been approved by Specmat.

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