Comment AG4108 SNF 2006-08-02 11:08:43: Ge Processing Done

mwiemer at snf.stanford.edu mwiemer at snf.stanford.edu
Wed Aug 2 11:08:43 PDT 2006


Clean wafers with unexposed Ge on them have now been processed in the chamber. The chamber must now be switched back to the original one which is clean. The chamber is now POTENTIALLY (though not really) contaminated. This process has been approved by Specmat.




More information about the AG4108-pcs mailing list