Shutdown AG4108 SNF 2006-08-02 17:43:09: Need to replace quartzware
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Aug 16 15:54:21 PDT 2006
Installed clean quartz chamber and tray. Performed pyrometer calibration. Ran test wafers to verify operation.
Process eng needs to run an oxidation test wafer to verify temperature cal.
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