Shutdown AG4108 SNF 2006-08-02 17:43:09: Need to replace quartzware

eenriquez at eenriquez at
Wed Aug 16 15:54:21 PDT 2006

Installed clean quartz chamber and tray.  Performed pyrometer calibration.  Ran test wafers to verify operation.  
Process eng needs to run an oxidation test wafer to verify temperature cal.

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