Comment AG4108 SNF 2006-08-02 11:08:43: Ge Processing Done

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Aug 16 15:54:41 PDT 2006


Installed clean quartz chamber and tray.  Performed pyrometer calibration.  Ran test wafers to verify operation.  
Process eng needs to run an oxidation test wafer to verify temperature cal.




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