Comment AG4108 SNF 2006-08-18 17:21:43: oxidation test results

rwoo at snf.stanford.edu rwoo at snf.stanford.edu
Fri Aug 18 17:21:44 PDT 2006


1150C 30s. Target thickness 120A
First Wafer: avg=108 std dev=2.8
Second Wafer: avg=102 std dev=3.9
Third Wafer: avg=115 std dev=3.0
Fourth Wafer: avg=117 std dev=3.8




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