Shutdown AG4108 SNF 2006-08-27 14:29:05: intial temperature is too high

ratiug at snf.stanford.edu ratiug at snf.stanford.edu
Sun Aug 27 14:29:06 PDT 2006


I ran a RTO1050 process for 30s, system stopped at the oxidation step and showed initial temp is too high.  I removed all my wafers in sending cassette and flat aligner.  But one dummy wafer was still inside the process chamber.




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