Shutdown AG4108 SNF 2006-08-27 14:29:05: intial temperature is too high

[ratiug at snf.stanford.edu]

I ran a RTO1050 process for 30s, system stopped at the oxidation step and showed initial temp is too high.  I removed all my wafers in sending cassette and flat aligner.  But one dummy wafer was still inside the process chamber.