From griffin at snf.stanford.edu Tue Feb 21 11:10:02 2006 From: griffin at snf.stanford.edu (griffin at snf.stanford.edu) Date: Tue, 21 Feb 2006 11:10:02 -0800 Subject: Shutdown AG4108 SNF 2006-02-21 11:10:01: robot broke wafer Message-ID: The robot broke a wafer, even after a re-initialize step. From eenriquez at snf.stanford.edu Thu Feb 23 00:00:55 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Feb 2006 00:00:55 -0800 Subject: Shutdown AG4108 SNF 2006-02-21 11:10:01: robot broke wafer Message-ID: Adjusted the wafer vacuum sensor. From griffin at snf.stanford.edu Thu Feb 23 13:36:22 2006 From: griffin at snf.stanford.edu (griffin at snf.stanford.edu) Date: Thu, 23 Feb 2006 13:36:22 -0800 Subject: Shutdown AG4108 SNF 2006-02-23 13:36:22: robot arm is not working (again!) Message-ID: The robot arm did not work in auto mode. It worked on some of the lower slots in manual mode, but the flat aligner gave trouble. Please check RTA functions by running the test wafers I left. You don't need a heat step to minimize contamination. Thanks. From eenriquez at snf.stanford.edu Fri Feb 24 16:02:50 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Feb 2006 16:02:50 -0800 Subject: Shutdown AG4108 SNF 2006-02-24 16:02:50: Pyrometer needs to be calibrated Message-ID: Allwin will be here Monday to calibrate the pyrometer. Clean chamber and tray has been installed.