Shutdown AG4108 SNF 2006-02-21 11:10:01: robot broke wafer
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Feb 23 00:00:55 PST 2006
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Shutdown AG4108 SNF 2006-02-21 11:10:01: robot broke wafer
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Shutdown AG4108 SNF 2006-02-23 13:36:22: robot arm is not working (again!)
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Adjusted the wafer vacuum sensor.
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Shutdown AG4108 SNF 2006-02-21 11:10:01: robot broke wafer
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Shutdown AG4108 SNF 2006-02-23 13:36:22: robot arm is not working (again!)
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