Shutdown AG4108 SNF 2006-02-23 13:36:22: robot arm is not working (again!)

griffin at snf.stanford.edu griffin at snf.stanford.edu
Thu Feb 23 13:36:22 PST 2006


The robot arm did not work in auto mode.	
It worked on some of the lower slots in manual mode,
but the flat aligner gave trouble.
Please check RTA functions by running the test wafers
I left. You don't need a heat step to minimize contamination.
Thanks.




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