Shutdown AG4108 SNF 2005-12-02 14:36:33: System doesn't work anymore
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Sun Jan 15 10:37:52 PST 2006
Replaced 5vdc and 15vdc power supplies. Replaced the flat aligner. Cycled 1 wafer 10 X with no problem ( I only had 1 clean wafer).
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