Problem AG4108 SNF 2006-01-16 17:16:34: 4108 new problem

king at snf.stanford.edu king at snf.stanford.edu
Mon Jan 16 17:16:35 PST 2006


During initial chamber heat and then also N2 anneal, the system shows gas flow out of spec.  The feedback interprets additional other gases as flowing including O2, NH3, Ar.  
It fails when it gets to the process wafer.  Have power cycled without improvement.




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