Problem AG4108 SNF 2006-01-30 15:32:02: Use for Silicon Only

emyers at snf.stanford.edu emyers at snf.stanford.edu
Mon Jan 30 15:32:03 PST 2006


Since the AG4100 is running, this tool will be dedicated to silicon only (NO Silicides or Ge).  The first tests with the new operating software were very poor.  The recipes need to be optimized.  Please contact either Uli or Ed before using the system.




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