Shutdown AG4108 SNF 2006-02-23 13:36:22: robot arm is not working (again!)

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Mar 6 21:53:34 PST 2006

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Verify that the vacuum pump for the wafer wand is on before starting your run.  Cycled wafers with no problems

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