Shutdown AG4108 SNF 2006-03-07 00:08:20: Flat aligner vacuum problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Mar 7 00:08:20 PST 2006

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The flat aligner  wafer vacuum is intermittent.  The flat aligner and the robot arm share the same vacuum pump.  The pump might need to be replaced.

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